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Micro Electromechanical Systems (MEMS) Practical Lab Manual - ebooks1001 - 03-03-2025
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Free Download Micro Electromechanical Systems (MEMS): Practical Lab Manual
English | 2025 | ISBN: 1394229836 | 180 Pages | PDF, EPUB (True) | 16 MB
Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.
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